Dergham D, Chekour L, Khen A. Microstructure and mechanical properties of magnetron sputtered Ti-Si-N coatings with different silicon content. Malaysian J. Sci. [Internet]. 2017 Dec. 28 [cited 2024 Dec. 22];36(3):175-83. Available from: https://ajap.um.edu.my/index.php/MJS/article/view/10160